Volume 3 Number 3 (May 2013)
Home > Archive > 2013 > Volume 3 Number 3 (May 2013) >
IJAPM 2013 Vol.3(3): 191-197 ISSN: 2010-362X
DOI: 10.7763/IJAPM.2013.V3.204

A Novel Sample Structure for the Measurement of Indium Segregation Profiles in GaAs/InGaAs/GaAs Heterostructures

A. Loykaew, B. F. Usher, R. T. Jones, and P. J. Pigram

Abstract—A novel technique to measure In segregation profiles is proposed by which depth composition information is converted to surface composition information by creating a miscut surface which intersects a previously grown GaAs/InGaAs/GaAs heterostructure. The surface chemical profiles were measured by static Time of Flight Secondary Ion Mass Spectrometry (ToF-SIMS) and High Resolution X-ray Diffraction (HRXRD) measurements were made to allowdetermination of the thicknesses of all the layers in the structure and the profile of the miscut surface. The translation from vertical to horizontal coordinates could then be made with acceptable precision. In segregation was clearly observed and appears as an approximately exponential profile at both the GaAs/InGaAs and InGaAs/GaAs interfaces.

Index Terms—In segregation, III-V compound semi-conductors, ToF-SIMS, HRXRD, MBE.

The authors are with La Trobe University, Faculty of Science, Technology and Engineering, School of Engineering and Mathematical Sciences, Department of Electronic Engineering, Bundoora, Victoria 3086, Australia (e-mail: aloykaew@students.latrobe.edu.au, B.Usher@latrobe.edu.au, R.Jones@latrobe.edu.au, P.Pigram@latrobe.edu.au).

Cite:A. Loykaew, B. F. Usher, R. T. Jones, and P. J. Pigram, "A Novel Sample Structure for the Measurement of Indium Segregation Profiles in GaAs/InGaAs/GaAs Heterostructures," International Journal of Applied Physics and Mathematics vol. 3, no. 3, pp. 191-197, 2013.

General Information

ISSN: 2010-362X (Online)
Abbreviated Title: Int. J. Appl. Phys. Math.
Frequency: Quarterly
DOI: 10.17706/IJAPM
Editor-in-Chief: Prof. Haydar Akca 
Abstracting/ Indexing: INSPEC(IET), CNKI, Google Scholar, EBSCO, Chemical Abstracts Services (CAS), etc.
E-mail: ijapm@iap.org
  • Dec 27, 2021 News!

    IJAPM Vol 9 & Vol 10 have been indexed by Inspec   [Click]

  • Jan 02, 2024 News!

    IJAPM will adopt Article-by-Article Work Flow For the Quarterly journal, each issue will be released at the end of the issue month

  • Jan 02, 2024 News!

    The papers published in Vol 13, No 4 has received dois from Crossref

  • Oct 09, 2023 News!

    IJAPM Vol 13, No 4 has been published with online version   [Click]

  • Oct 09, 2023 News!

    The papers published in Vol 13, No 3 has received dois from Crossref

  • Read more>>